Magneto-optical micro-optical accelerometer
Micro-optical acceleration sensing technology (MOEMS) combines the advantages of miniaturisation and low cost of MEMS technology and the high precision of optical detection, and has become the main direction of acceleration sensor development. With the advancement of optical quantum precision measurement technology, the accuracy of spin angle detection based on Faraday spin effect has been improving, and the synthesis of magneto-optical crystals with high Verdet constants has provided new measurement methods for micro-optical sensing technology. However, the structure of micro-optical accelerometers is susceptible to noise such as temperature and vibration, and although a temperature-control system is usually employed to suppress …